FizCam DUV

The FizCam DUV dynamic laser interferometer provides accurate measurement of optics and optical systems at deep ultra-violet wavelengths for lithography applications.

Additional information

The FizCam DUV incorporates a single camera, high-speed optical phase sensor that makes a wavefront measurement in less than 1 millisecond. Because acquisition time is so short, the FizCam DUV can measure accurately in environments with heavy vibration and air flow, as is typical of DUV compliant clean rooms.

Built to the stringent specifications of DUV optics manufacturing, FizCam DUV components are stainless/electroless nickel plated, and the laser path is entirely contained in a purged nitrogen environment.

Motorised controls include 2X discrete optical zoom, focus, polarization, input beam alignment, transmission flat tip/tilt and optional return flat tip/tilt.

Download

FizCam DUV Data Sheet.pdf
+44 (0) 1829 773155

Secure payments with PayPal

PayPal and all major credit cards accepted.

Next day delivery for UK orders before 3pm, subject to stock availability.

Delivery charge for UK orders - £6.50

Non-UK orders - Delivery is based on weight of order

Prices shown exclude VAT and delivery.